Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors

Menou, M.M.MenouTurquat, Ch.Ch.TurquatMadigou, V.V.MadigouMuller, Ch.Ch.MullerGoux, LudovicLudovicGouxLisoni, JuditJuditLisoniSchwitters, MichaelMichaelSchwittersWouters, DirkDirkWouters2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10880Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitorsJournal article