High performance Si/SiGE pMOSFETs fabricated in a standard CMOS process technology

Collaert, NadineNadineCollaertVerheyen, PeterPeterVerheyenDe Meyer, KristinKristinDe MeyerLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7333High performance Si/SiGE pMOSFETs fabricated in a standard CMOS process technologyJournal article