De Wolf, IngridIngridDe WolfIgnat, M.M.IgnatPozza, G.G.PozzaManiguet, L.L.ManiguetMaes, HermanHermanMaes2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3389Analysis of local mechanical stresses in and near tungsten lines on silicon substratesJournal article