Observation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEM

Aabdin, ZainulZainulAabdinXu, XiuMeiXiuMeiXuLeong, Fong YewFong YewLeongHolsteyns, FrankFrankHolsteynsMirsaidov, UtkurUtkurMirsaidov2025-02-102023-08-302025-02-102023-081662-9779https://imec-publications.be/handle/20.500.12860/42424Observation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEMProceedings paper10.4028/p-u0ABQ4