Holsteyns, FrankFrankHolsteynsRoels, J.J.RoelsLe, Quoc ToanQuoc ToanLeKenis, KarineKarineKenisMertens, PaulPaulMertens2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9048Seeing through the haze: process monitoring and qualification using comprehensive surface dataJournal article