Puliyalil, HarinarayananHarinarayananPuliyalilFeurprier, YannickYannickFeurprierOikawa, NoriakiNoriakiOikawaVega Gonzalez, VictorVictorVega GonzalezBriggs, BasoeneBasoeneBriggsMontero Alvarez, DanielDanielMontero AlvarezLazzarino, FredericFredericLazzarinoTokei, ZsoltZsoltTokeiSatoru, NakamuraNakamuraSatoruTahara, ShigeruShigeruTaharaKumar, KaushikKaushikKumar2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37072High Aspect Ratio Supervia Dual Damascene etch for iN5 and beyondMeeting abstracthttps://www.avssymposium.org/AVS2021/Sessions/Schedule/70702