Ultra thin plasma nitrided oxides for sub-100nm CMOS

Rothschild, AudeAudeRothschildVeloso, AnabelaAnabelaVelosoMertens, SofieSofieMertensSchaekers, MarcMarcSchaekersCubaynes, FlorenceFlorenceCubaynesDate, LucienLucienDatePique, DidierDidierPique2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6773Ultra thin plasma nitrided oxides for sub-100nm CMOSOral presentation