Tokei, ZsoltZsoltTokeide Marneffe, Jean-FrancoisJean-Francoisde MarneffeBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21615Interconnect scaling for10nm and beyondMeeting abstract