Halder, SandipSandipHalderTruffert, VincentVincentTruffertVan Den Heuvel, DieterDieterVan Den HeuvelLeray, PhilippePhilippeLerayCheng, ShauneeShauneeChengMcIntyre, GregGregMcIntyreSah, KaushikKaushikSahBrown, JimJimBrownParisi, PaoloPaoloParisiPolli, MarcoMarcoPolli2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25357Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platformsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7164444