Bose, SouravSouravBoseCunha, José M.V.José M.V.CunhaSuresh, SunilSunilSureshde Wild, JessicaJessicade WildLopes, Tomas S.Tomas S.LopesBarbosa, Joao R.S.Joao R.S.BarbosaSilva, RicardoRicardoSilvaBorme, JérômeJérômeBormeFernandes, Paulo A.Paulo A.FernandesVermang, BartBartVermangSalomé, Pedro M.P.Pedro M.P.Salomé2021-10-252021-10-2520182367-198Xhttps://imec-publications.be/handle/20.500.12860/30307Optical lithography patterning of SoO2 layers for interface passivation of thin film solar cellsJournal article10.1002/solr.201800212https://onlinelibrary.wiley.com/doi/abs/10.1002/solr.201800212