Using the low frequency component of the background signal for SiGe and Ge growth monitoring

Halder, SandipSandipHalderSchulze, AndreasAndreasSchulzeLeray, PhilippePhilippeLerayCaymax, MattyMattyCaymaxBast, GerhardGerhardBastSimpson, GavinGavinSimpsonUlea, NeliNeliUleaPolli, MarcoMarcoPolli2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25356Using the low frequency component of the background signal for SiGe and Ge growth monitoringProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7164442