Shimizu, K.K.ShimizuHabazaki, H.H.HabazakiGijbels, R.R.GijbelsBender, HugoHugoBender2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9587The dawn of surface analysis that stands by the side of users - Ultra-thin film analysis by rf-GDOESJournal article