Experimental study and optimization of scanning capacitance microscopy for two-dimensional carrier profiling of submicron semiconductor devices

Vandervorst, W.Duhayon, NatasjaNatasjaDuhayon2026-06-112026-06-112006https://imec-publications.be/handle/20.500.12860/59671Experimental study and optimization of scanning capacitance microscopy for two-dimensional carrier profiling of submicron semiconductor devicesPHD thesis