Towards a complete description of line width roughness: a comparison of different methods for vertical and spatial LER and LWR analysis

Constantoudis, VassilisVassilisConstantoudisPatsis, GeorgeGeorgePatsisLeunissen, PeterPeterLeunissenGogolides, EvangelosEvangelosGogolides2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8719Towards a complete description of line width roughness: a comparison of different methods for vertical and spatial LER and LWR analysisProceedings paper