Vantomme, AndreAndreVantommeWahl, U.U.WahlWu, Ming FangMing FangWuHogg, S.S.HoggPattyn, HugoHugoPattynLangouche, G.G.LangoucheBender, HugoHugoBender2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3102Backscattering/channeling study of high-dose rare-earth implants into SiJournal article