Li, YunlongYunlongLiVan Huylenbroeck, StefaanStefaanVan HuylenbroeckVan Besien, ElsElsVan BesienShi, XiaopingXiaopingShiWu, ChenChenWuStucchi, MicheleMicheleStucchiBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneDe Wolf, IngridIngridDe WolfCroes, KristofKristofCroes2021-10-222021-10-2220140026-2714https://imec-publications.be/handle/20.500.12860/24137Reliability challenges for barrier/liner system in high aspect ratio through silicon viasJournal articlehttp://www.sciencedirect.com/science/article/pii/S002627141400273X