Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxide

Depas, MichelMichelDepasVermeire, BertBertVermeireMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/622Growth kinetics and electrical characteristics of ultra-thin pyrogenetic silicon oxideJournal article