Influence of UV light on PECVD silicon nitride waveguide propagation loss

Neutens, PieterPieterNeutensRutowska, MonikaMonikaRutowskaVan Roy, WimWimVan RoyJansen, RoelofRoelofJansenBuja, FedericoFedericoBujaVan Dorpe, PolPolVan Dorpe2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31411Influence of UV light on PECVD silicon nitride waveguide propagation lossProceedings paperhttps://ieeexplore.ieee.org/document/8478749