The effect of elevated temperature on the reliability of very thin oxide films

Kaczer, BenBenKaczerDegraeve, RobinRobinDegraevePangon, NadègeNadègePangonNigam, TanyaTanyaNigamGroeseneken, GuidoGuidoGroeseneken2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3546The effect of elevated temperature on the reliability of very thin oxide filmsProceedings paper