Characterization of thin silicon films grown in a batch-type LP-CVD system

Van Nieuwenhuysen, KrisKrisVan NieuwenhuysenVan Gestel, DriesDriesVan GestelKuzma Filipek, IzabelaIzabelaKuzma FilipekDuerinckx, FilipFilipDuerinckxBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11415Characterization of thin silicon films grown in a batch-type LP-CVD systemProceedings paper