La Manna, AntonioAntonioLa MannaRebibis, Kenneth JuneKenneth JuneRebibisDe Vos, JoeriJoeriDe VosBogaerts, LieveLieveBogaertsGerets, CarineCarineGeretsBeyne, EricEricBeyne2021-10-202021-10-202012-09https://imec-publications.be/handle/20.500.12860/20974Small pitch micro-bumping and experimental investigation for under filling 3D stackingProceedings paper