Pijolat, C.C.PijolatLalauze, R.R.LalauzeRoggen, JeanJeanRoggenHuyberechts, GuidoGuidoHuyberechts2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/823Fabrication technologies for thin and thick film SnO2 sensorsProceedings paper