Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements

Norga, GerdGerdNorgaPlatero, M.M.PlateroBlack, K. A.K. A.BlackReddy, A. J.A. J.ReddyMichel, J.J.MichelKimerling, L. C.L. C.Kimerling2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2810Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurementsJournal article