Selective epitaxial growth (SEG) of p-GaN gate layer for enhancement mode GaN/AlGaN HEMT

Liang, HuHuLiangSaripalli, YogaYogaSaripalliDe Jaeger, BriceBriceDe JaegerDecoutere, StefaanStefaanDecoutere2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26909Selective epitaxial growth (SEG) of p-GaN gate layer for enhancement mode GaN/AlGaN HEMTMeeting abstract