Royere, GaelGaelRoyereTeugels, LieveLieveTeugelsIto, BanBanItoIizumi, TakeshiTakeshiIizumiDurix, FabienFabienDurixDevriendt, KatiaKatiaDevriendtOng, PatrickPatrickOngStruyf, HerbertHerbertStruyf2021-10-262021-10-262018-10https://imec-publications.be/handle/20.500.12860/31689The impact of the pad surface temperature control on W CMP performanceProceedings paperhttp://cmpugm.com/2018/sub/Program_book.pdf