SPER junction optimisation in 45nm CMOS devices

Lindsay, RichardRichardLindsaySeveri, SimoneSimoneSeveriPawlak, BartekBartekPawlakHenson, KirklenKirklenHensonLauwers, AnneAnneLauwersPagès, XavierXavierPagèsSatta, AlessandraAlessandraSattaSurdeanu, RaduRaduSurdeanuLendzian, H.H.LendzianMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9207SPER junction optimisation in 45nm CMOS devicesMeeting abstract