Ritzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramSpessot, AlessioAlessioSpessotCaillat, ChristianChristianCaillatCho, Moon JuMoon JuChoSimoen, EddyEddySimoenAoulaiche, MarcMarcAoulaicheAlbert, JohanJohanAlbertChew, Soon AikSoon AikChewNoh, Kyung BongKyung BongNohSon, YunikYunikSonMitard, JeromeJeromeMitardMocuta, AndaAndaMocutaHoriguchi, NaotoNaotoHoriguchiFazan, PierrePierreFazanThean, AaronAaronThean2021-10-232021-10-2320160018-9383https://imec-publications.be/handle/20.500.12860/27219Diffusion and gate replacement: a new gate-first high-k/metal gate CMOS integration scheme suppressing gate height symmetryJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7348710