Van Daele, MichielMichielVan DaeleGriffiths, Matthew B.E.Matthew B.E.GriffithsRaza, AliAliRazaMinjauw, Matthias M.Matthias M.MinjauwSolano, EduardoEduardoSolanoFeng, Ji-YuJi-YuFengRamachandran, Ranjith K.Ranjith K.RamachandranClemmen, StephaneStephaneClemmenBaets, RoelRoelBaetsBarry, Sean Y.Sean Y.BarryDetavenier, ChristopheChristopheDetavenierDendooven, JolienJolienDendooven2021-10-272021-10-272019-091944-8244https://imec-publications.be/handle/20.500.12860/34182Plasma-enhanced atomic layer deposition of nanostructured gold near room temperatureJournal articlehttps://doi.org/10.1021/acsami.9b10848