Focused ion beam preparation for cross-sectional transmission electron microscopy investigation of the top surface of unpassivated or partially processed ULSI devices

Bender, HugoHugoBenderVan Marcke, PieterPieterVan MarckeDrijbooms, ChrisChrisDrijboomsRoussel, PhilippePhilippeRoussel2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2390Focused ion beam preparation for cross-sectional transmission electron microscopy investigation of the top surface of unpassivated or partially processed ULSI devicesProceedings paper