Understanding the effect of confinement in scanning spreading resistance microscopy measurements

Pandey, KomalKomalPandeyParedis, KristofKristofParedisRobson, AlexanderAlexanderRobsonVandervorst, WilfriedWilfriedVandervorst2021-10-292021-10-2920200021-8979https://imec-publications.be/handle/20.500.12860/35698Understanding the effect of confinement in scanning spreading resistance microscopy measurementsJournal article10.1063/5.0011703