Ronse, KurtKurtRonse2025-01-212024-07-162025-01-2120242590-0072WOS:001263723700001https://imec-publications.be/handle/20.500.12860/44165Continued dimensional scaling through projection lithographyJournal article review10.1016/j.mne.2024.100263WOS:001263723700001PHOTOLITHOGRAPHYRESOLUTION