Non-volatile microfluidics controlled switch fabricated in fused silica by femtosecond laser inscription

Radosavljevic, AnaAnaRadosavljevicDesmset, A.A.DesmsetMissinne, JeroenJeroenMissinneTuccio, S.S.TuccioPanapakkam, V.V.PanapakkamSaurav, K.K.SauravLerma Arce, C.C.Lerma ArceWatte, J.J.WatteVan Thourhout, DriesDriesVan ThourhoutVan Steenberge, GeertGeertVan Steenberge2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33849Non-volatile microfluidics controlled switch fabricated in fused silica by femtosecond laser inscriptionMeeting abstracthttps://www.osapublishing.org/abstract.cfm?uri=CLEO_Europe-2019-cm_8_2