Zhao, ChaoChaoZhaoWitters, ThomasThomasWittersBrijs, BertBertBrijsBender, HugoHugoBenderRichard, OlivierOlivierRichardCaymax, MattyMattyCaymaxHeeg, T.T.HeegSchubert, J.J.SchubertAfanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmans2021-10-162021-10-162005-03https://imec-publications.be/handle/20.500.12860/11609Ternary rare-earth metal oxide high-k layers on silicon oxideJournal article