Design for hybrid SOI/silicon nitride high cooperativity optomechanical cavity

Tiebot, PaulPaulTiebotKuyken, BartBartKuykenVan Thourhout, DriesDriesVan Thourhout2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27394Design for hybrid SOI/silicon nitride high cooperativity optomechanical cavityProceedings paper