Radiation damages of polycrystalline silicon films and NPN Si transistors by high-energy particle irradiation

Ohyama, HidenoriHidenoriOhyamaNakabayashi, M.M.NakabayashiSimoen, EddyEddySimoenClaeys, C.C.ClaeysTanaka, T.T.TanakaHirao, T.T.HiraoOnada, S.S.OnadaKobayashi, K.K.Kobayashi2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5533Radiation damages of polycrystalline silicon films and NPN Si transistors by high-energy particle irradiationOral presentation