Janssens, TomTomJanssensDoumen, GeertGeertDoumenHalder, SandipSandipHalderWostyn, KurtKurtWostynMertens, PaulPaulMertensStraka, JoachimJoachimStraka2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13923The influence of standing waves on cleaning with a megasonic nozzleOral presentation