Hikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelWitters, LiesbethLiesbethWittersMertens, HansHansMertensRyan, PaulPaulRyanLanger, RobertRobertLangerLoo, RogerRogerLoo2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23938Use of X-ray techniques in the development and production of novel transistor structuresProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6874676&contentType=Conference+Publications