Paolillo, SaraSaraPaolilloWan, DannyDannyWanLazzarino, FredericFredericLazzarinoRassoul, NouredineNouredineRassoulPiumi, DanieleDanielePiumiTokei, ZsoltZsoltTokei2021-10-262021-10-2620181071-1023https://imec-publications.be/handle/20.500.12860/31476Direct metal etch for advanced interconnectJournal articlehttps://doi.org/10.1116/1.5022283