Kluge, InesInesKlugeSchulten, MichaelMichaelSchultenMashayekh, Alireza TabatabaeiAlireza TabatabaeiMashayekhRodrigo, RebeccaRebeccaRodrigoAckermann, ManuelManuelAckermannGhannam, IbrahimIbrahimGhannamStassen, AndimAndimStassenMerget, FlorianFlorianMergetLeisching, PatrickPatrickLeischingWitzens, JeremyJeremyWitzens2023-06-162022-08-142023-06-162022978-1-5106-4883-80277-786XWOS:000831668100013https://imec-publications.be/handle/20.500.12860/40260Flip-chip-integrated silicon nitride ECL at 640nm with relaxed alignment tolerancesProceedings paper10.1117/12.2607615978-1-5106-4884-5WOS:000831668100013LASER