Exploration of process window for fill of sub 30 nm features by direct plating

Nagar, MagiMagiNagarRadisic, AlexAlexRadisicStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21185Exploration of process window for fill of sub 30 nm features by direct platingMeeting abstract