Clarysse, TrudoTrudoClarysseHoflijk, IlseIlseHoflijkZhang, WenqiWenqiZhangMaex, KarenKarenMaexVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7331Metal film characterization with qualified spreading resistanceProceedings paper