Realization of InAsP compliant substrates for the fabrication of lattice-mismatched InP-based devices

Vanhollebeke, KoenKoenVanhollebekeNica, J.J.NicaMoerman, IngridIngridMoermanVan Daele, PeterPeterVan Daele2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5796Realization of InAsP compliant substrates for the fabrication of lattice-mismatched InP-based devicesProceedings paper