Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems

Mulder, MelchiorMelchiorMulderEngelen, AndreAndreEngelenNoordman, OscarOscarNoordmanStreutker, GertGertStreutkervan Drieenhuizen, BertBertvan Drieenhuizenvan Nuenen, CasCasvan NuenenEndendijk, WilfredWilfredEndendijkVerbeeck, JefJefVerbeeckBouman, WimWimBoumanBouma, AnitaAnitaBoumaKazinczi, RobertRobertKazincziSocha, RobertRobertSochaJuergens, DirkDirkJuergensZimmermann, JoergJoergZimmermannTrauter, BastianBastianTrauterBekaert, JoostJoostBekaertLaenens, BartBartLaenensCorliss, DanielDanielCorlissMcIntyre, GregGregMcIntyre2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17660Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systemsProceedings paper