Karabacak, DevrezDevrezKarabacakBrongersma, SywertSywertBrongersmaCrego Calama, MercedesMercedesCrego Calama2021-10-182021-10-1820101473-0197https://imec-publications.be/handle/20.500.12860/17348Enhanced sensitivity volatile detection with low power integrated micromechanical resonatorsJournal article