Scaling-friendly approaches to minimize the magnitude and asymmetry of wafer warpage during 3-D NAND fabrication

Okudur, Oguzhan OrkutOguzhan OrkutOkudurGonzalez, MarioMarioGonzalezVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2023-08-022023-06-252023-07-112023-08-0220230026-2714WOS:000992605100001https://imec-publications.be/handle/20.500.12860/42086Scaling-friendly approaches to minimize the magnitude and asymmetry of wafer warpage during 3-D NAND fabricationJournal article10.1016/j.microrel.2023.114996WOS:000992605100001