Design and characterization of a thermally actuated latching MEMS swith for telecommunication applications

Dellaert, DriesDriesDellaertDoutreloigne, JanJanDoutreloigne2021-10-222021-10-2220140960-1317https://imec-publications.be/handle/20.500.12860/23746Design and characterization of a thermally actuated latching MEMS swith for telecommunication applicationsJournal articlehttp://iopscience.iop.org/0960-1317/24/7/075022