300 mm silicon quantum computing: a silicon-based platform for quantum computing device technologies

Kubicek, StefanStefanKubicekGovoreanu, BogdanBogdanGovoreanuJussot, JulienJulienJussotChan, BTBTChanDumoulin Stuyck, NardNardDumoulin StuyckMohiyaddin, Fahd AyyalilFahd AyyalilMohiyaddinLi, RoyRoyLiSimion, GeorgeGeorgeSimionIvanov, TsvetanTsvetanIvanovLee, JamesJamesLeeRadu, IulianaIulianaRadu2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33343300 mm silicon quantum computing: a silicon-based platform for quantum computing device technologiesProceedings paper