A detailed study on the growth of thin oxide layers on silicon using ozonated solutions

De Smedt, FrankFrankDe SmedtVinckier, ChrisChrisVinckierCornelissen, IngridIngridCornelissenDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4273A detailed study on the growth of thin oxide layers on silicon using ozonated solutionsJournal article