Thermal desorption issues related to silicidation and back-end metallization

Li, HuaHuaLiVereecke, GuyGuyVereeckeSchaekers, MarcMarcSchaekersBaklanov, MikhaïlMikhaïlBaklanovSleeckx, ErikErikSleeckxMaex, KarenKarenMaexFroyen, L.L.Froyen2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4529Thermal desorption issues related to silicidation and back-end metallizationProceedings paper