Franquet, AlexisAlexisFranquetTsvetanova, DianaDianaTsvetanovaConard, ThierryThierryConardVos, RitaRitaVosVereecke, GuyGuyVereeckeMertens, PaulPaulMertensHeyns, MarcMarcHeynsVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17117ToF-SIMS and XPS study of ion implanted 248nm deep ultraviolet (DUV) photoresistOral presentation